Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies
Overview & Synopsis
This book focuses on the latest development of devices and fabrication
processes in the field of extremely miniaturized electromechanical systems. The
book offers new knowledge and insight into design, fabrication, and packaging,
as well as solutions in these aspects for targeted applications, aiming to
support scientists, engineers and academic trainees who are engaged in relevant
research.
Indexed from repository: FreeBookCentre
(
freebookcentre.net)
Document Information
| Document Title | Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies |
|---|---|
| Author / Organization | Kenichi Takahata |
| Categories | Microelectronics |
| Resource Verification | Listed PDF (Verification Pending) |
| Original Host Website |
FreeBookCentre
(freebookcentre.net)
|
| File Format | application/pdf (Portable Document Format) |
| Page Count | 226 pages |
| Language | EN |
| Catalog ID | DOC-309574 |
| Original Source Link | Visit Source Page on freebookcentre.net » |