Introduction to Microelectronic Fabrication

Overview & Synopsis

This lecture
note provides an introduction to the theoretical background and
application of each major IC fabrication processes: eg. oxidation, doping,
depositions, photolithography and etching. The prerequisites are the students
need are an understanding of basic transistor and diode operation. Topics
covered includes: Clean Room Technology Silicon Wafer Production,
Thermal Oxidation, Lithography, Advanced Lithography, Etching , Diffusion
Processes and Ion Implantation, Thin Film Deposition, Packaging, Yields,
Processing Silicon Foundries, CMOS and Bipolar Process Integration in practice,
Photolithography: resists, coating and mask aligners, CVD epitaxy and Plasma
etching.