Introduction to Microelectronic Fabrication Processes
Overview & Synopsis
The target
audience of this note is undergraduate chemical engineering and electronics and
communication engineering students. The focus will be on the various modules
relevant for chip manufacturing. Topics covered includes: Lithography, Depostion
Techniques, Removal Techniques, FEOL, Diffusion, Ion Implantation, Oxidation, ,
process Integration, Testing, Yield, Tools and Techniques.
Indexed from repository: FreeBookCentre
(
freebookcentre.net)
Document Information
| Document Title | Introduction to Microelectronic Fabrication Processes |
|---|---|
| Author / Organization | Dr. S. Ramanathan |
| Categories | Microelectronics |
| Resource Verification | Listed PDF (Verification Pending) |
| Original Host Website |
FreeBookCentre
(freebookcentre.net)
|
| File Format | application/pdf (Portable Document Format) |
| Language | EN |
| Catalog ID | DOC-309572 |
| Original Source Link | Visit Source Page on freebookcentre.net » |