Influence of the temporal variations of plasma composition on the cyclic formation of dust in hexamethyldisiloxane-argon radiofrequency discharges: Analysis by time-resolved mass spectrometry
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hal.science)
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| Document Title | Influence of the temporal variations of plasma composition on the cyclic formation of dust in hexamethyldisiloxane-argon radiofrequency discharges: Analysis by time-resolved mass spectrometry |
|---|---|
| Author / Organization | Bernard Despax, F. Gaboriau, Hubert Caquineau, Kremena Makasheva |
| Subject & Discipline | Multidisciplinary Academic Open Research |
| Categories | Science & Mathematics |
| Publication Year | 2016 |
| License / Rights | Open Access / Creative Commons |
| Resource Verification | Listed PDF (Verification Pending) |
| Original Host Website |
HAL Open Science
(hal.science)
|
| File Format | application/pdf (Portable Document Format) |
| Language | EN |
| Catalog ID | DOC-141442 |
| Original Source Link | Visit Source Page on hal.science » |