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Influence of the temporal variations of plasma composition on the cyclic formation of dust in hexamethyldisiloxane-argon radiofrequency discharges: Analysis by time-resolved mass spectrometry
Author / Organization: Bernard Despax, F. Gaboriau, Hubert Caquineau, Kremena Makasheva
| File Format | PDF (Portable Document Format) |
|---|---|
| Publication Year | 2016 |
| Source Host |
HAL Open Science
(hal.science)
|
| License / Terms | Open Access / Creative Commons |
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