A linear radio frequency plasma reactor for potential and current mapping in a magnetized plasma

Overview & Synopsis

Langmuir probe measurements in front of high power ion cyclotron resonant frequency antennas are not possible or simply too noisy to be analyzed properly. A linear experiment is a radio frequency (RF) magnetized plasma discharge reactor designed to probe the rectified potential in front of such antennas but at low power level (1 kW) to next improve antenna design and mitigate sheath effects. The maximum magnetic field is 0.1 T, and the RF amplifier can work between 10 kHz and 250 MHz allowing ion cyclotron resonances for argon or helium. The first measurements with no magnetic field are presented here, especially 2D potential maps extracted from the RF compensated probe measurements yield ni ≈ 1015 m−3 and T e ≈ 2 eV for RF power lower than 100 W. Series resonances in the chamber are highlighted and allow to deduce the plasma parameters from a simple equivalent impedance model of the plasma in helium gas. Next studies will be focused on magnetized plasmas and especially magnetized RF sheaths.