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A comparative study of O2/SiH4 and N2O/SiH4 mixtures for SiO2 deposition in a microwave afterglow
Author / Organization: H. del Puppo, J. Desmaison, L. Peccoud
| File Format | PDF (Portable Document Format) |
|---|---|
| Publication Year | 1993 |
| Source Host |
HAL Open Science
(hal.science)
|
| License / Terms | Open Access / Creative Commons |
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