ELECTRON SIGNIFICANCE TO DIAMOND SYNTHESIS IN PLASMA ENHANCED CVD PROCESS
Overview & Synopsis
The role of electrons in the process of diamond synthesis in radio frequency hydrocarbon plasma has been shown. Polycrystalline diamond films were grown when electrons from an independent source were used. Without the electrons the amorphous carbon films were observed.
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Document Information
| Document Title | ELECTRON SIGNIFICANCE TO DIAMOND SYNTHESIS IN PLASMA ENHANCED CVD PROCESS |
|---|---|
| Author / Organization | S. Mitura |
| Subject & Discipline | Multidisciplinary Academic Open Research |
| Categories | Science & Mathematics |
| Publication Year | 1991 |
| License / Rights | Open Access / Creative Commons |
| Resource Verification | Listed PDF (Verification Pending) |
| Original Host Website |
HAL Open Science
(hal.science)
|
| File Format | application/pdf (Portable Document Format) |
| Language | EN |
| Catalog ID | DOC-62415 |
| Original Source Link | Visit Source Page on hal.science » |