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Influence des caractéristiques du plasma initiateur sur la formation des couches minces d'oxydes de cuivre dans la pulvérisation cathodique réactive
Author / Organization: G. Perny, B. Laville-Saint-Martin
| File Format | PDF (Portable Document Format) |
|---|---|
| Publication Year | 1964 |
| Source Host |
HAL Open Science
(hal.science)
|
| License / Terms | Open Access / Creative Commons |
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