Characterization of interfaces by grazing incidence X-ray scattering

Overview & Synopsis

The advantages of the grazing incidence X-ray scattering geometry are emphasized and the basic expressions of scattered intensity are briefly recalled. The application of X-ray scattering to the structural characterization of interfaces is discussed on selected examples. Well chosen reciprocal space scans, both in-plane and out-of plane, are shown to provide complementary information on interfacial registry for coherent interfaces ; and on strain deformation, island or grain sizes for incoherent epilayers. The strength of the technique to analyze the atomic structure of interfacial phases is discussed.