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Real-to-Sim Calibration of Bosch Etching Simulators with Few-Shot XSEM Data and Hybrid Search
Author / Organization: Xinyu Jia, Jainil Shah, Rahul Tripathi, Vijay Gupta, Zhihong Chen
| File Format | PDF (Portable Document Format) |
|---|---|
| Publication Year | 2026 |
| Source Host |
arXiv
(arxiv.org)
|
| License / Terms | arXiv Open Access / Creative Commons |
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