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KNN lead-free technology on 200 mm Si wafer for piezoelectric actuator applications
Author / Organization: Hugo Kuentz, Christel Dieppedale, Laurent Mollard, Romain Liechti, Alain Campo, Antoine Hamelin, Valérie Demange, Christophe Poulain, Maryline Guilloux-Viry, Gwenael Le Rhun
| File Format | PDF (Portable Document Format) |
|---|---|
| Publication Year | 2024 |
| Source Host |
HAL Open Science
(hal.science)
|
| License / Terms | Open Access / Creative Commons |
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