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RF magnetron sputtering deposition of multilayers optical filters for ultra-broadband applications with a large number of thin layers
Author / Organization: Maxime Duris, Bryan Horcholle, Cédric Frilay, C. Labbe, Xavier Portier, Philippe Marie, Sylvain Duprey, Franck Lemarié, Julien Cardin
| File Format | PDF (Portable Document Format) |
|---|---|
| Publication Year | 2021 |
| Source Host |
HAL Open Science
(hal.science)
|
| License / Terms | Open Access / Creative Commons |
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