Performance of the reflected beam sputter source
Overview & Synopsis
The reflected beam sputter source is a modification of a Hiconex 834 sputter source. Instead of target cones small cylindrical pills of target material are being used which are bombarded by the reflected cesium beam. Some output data, results on transmission and emittance measurements are presented. The source turns out to be superior to the original in most properties.
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hal.science)
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Document Information
| Document Title | Performance of the reflected beam sputter source |
|---|---|
| Author / Organization | K. Brand |
| Subject & Discipline | Multidisciplinary Academic Open Research |
| Categories | Science & Mathematics |
| Publication Year | 1977 |
| License / Rights | Open Access / Creative Commons |
| Resource Verification | Listed PDF (Verification Pending) |
| Original Host Website |
HAL Open Science
(hal.science)
|
| File Format | application/pdf (Portable Document Format) |
| Language | EN |
| Catalog ID | DOC-22606 |
| Original Source Link | Visit Source Page on hal.science » |