Dust cloud dynamics during particle successive generations
Overview & Synopsis
Silane-based plasmas are widely used to deposit nanostructured silicon thin films or to synthesize silicon nanoparticles. Dust particle formation in Ar/SiH4 plasmas is a continuous phenomenon: as long as silane precursors are provided, new dust generations are formed. Successive generations can be monitored thanks to various electrical (Vdc/3H) and optical (OES, video imaging) diagnostics. Experiments presented in this paper have been performed in a capacitively-coupled radiofrequency discharge, at low pressure (12 Pa) in an Argon/Silane mixture (92:8).
Indexed from repository: HAL Open Science
(
hal.science)
Keyboard Shortcuts:
← / → for pages • + / - for zoom • 0 to fit width
Powered by Mozilla PDF.js v3.11
Document Information
| Document Title | Dust cloud dynamics during particle successive generations |
|---|---|
| Author / Organization | Marjorie Cavarroc, Maxime Mikikian, Yves Tessier, Laïfa Boufendi |
| Subject & Discipline | Multidisciplinary Academic Open Research |
| Categories | Science & Mathematics |
| Publication Year | 2007 |
| License / Rights | Open Access / Creative Commons |
| Resource Verification | Listed PDF (Verification Pending) |
| Original Host Website |
HAL Open Science
(hal.science)
|
| File Format | application/pdf (Portable Document Format) |
| Language | EN |
| Catalog ID | DOC-221921 |
| Original Source Link | Visit Source Page on hal.science » |