A Bimodal "Sensor Chiplet" Platform Applied for Albumin and pH Multi-Chemical Sensing
Overview & Synopsis
A new concept of agile and multimodal chemical sensing platform, named “Sensor Chiplet” is proposed and experimentally validated. The concept is inspired by the recent trend in large scale integrated (LSI) circuits, to quickly realize high functionality by pieces of LSI “Chiplets”. As a proof of concept, pH and albumin sensing was demonstrated by a bimodal device composed of two planar “Sensor Chiplets” having microelectrode arrays (MEAs). Two 8 ×16 mm2 Si chiplets with thirteen gold (Au) and indium tin oxide (ITO) microelectrodes with maximum electrode size of 512 × 512 µm2 were fabricated, functionalized, integrated and tested using surface micromachining, deep-reactive ion etching (RIE) and subsequent chemical functionalization. Results obtained shows that the proposed concept enables the integration of modalities without sacrificing sensitivity.
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Document Information
| Document Title | A Bimodal "Sensor Chiplet" Platform Applied for Albumin and pH Multi-Chemical Sensing |
|---|---|
| Author / Organization | Shimamura Ryugo, Yasunaga Shun, Misumi Kei, Eiler Anne-Claire, Higo Akio, Hwang Gilgueng, Mizushima Ayako, Zhu Dongchen, Komori Kikuo, Sakai Yasuyuki, Toshiyoshi Hiroshi, Tixier-Mita Agnes, Mita Yoshio |
| Subject & Discipline | Multidisciplinary Academic Open Research |
| Categories | Science & Mathematics |
| Publication Year | 2023 |
| License / Rights | Open Access / Creative Commons |
| Resource Verification | Listed PDF (Verification Pending) |
| Original Host Website |
HAL Open Science
(hal.science)
|
| File Format | application/pdf (Portable Document Format) |
| Language | EN |
| Catalog ID | DOC-148491 |
| Original Source Link | Visit Source Page on hal.science » |