Reduced-order modeling of electrostatic MEMS resonators
Overview & Synopsis
This is a handout for my course on MEMS physics and modeling at Université Paris-Saclay. It contains useful formulas for modeling the behavior of electrostatically-actuated 2- and 3-port cantilever / CC-beam resonators oscillating close to their first resonance frequency, in their nonlinear regime. Nonlinear damping is neglected but may be included using the procedure given in the handout. Feel free to contact me if you have any questions / comments regarding this material.
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hal.science)
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Document Information
| Document Title | Reduced-order modeling of electrostatic MEMS resonators |
|---|---|
| Author / Organization | Jérôme Juillard |
| Subject & Discipline | Multidisciplinary Academic Open Research |
| Categories | Science & Mathematics |
| Publication Year | 2015 |
| License / Rights | Open Access / Creative Commons |
| Resource Verification | Listed PDF (Verification Pending) |
| Original Host Website |
HAL Open Science
(hal.science)
|
| File Format | application/pdf (Portable Document Format) |
| Language | EN |
| Catalog ID | DOC-14604 |
| Original Source Link | Visit Source Page on hal.science » |