Nitrogen Plasma Instabilities and the Growth of Silicon Nitride by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition
Indexed from repository: NASA Technical Reports Server
(
ntrs.nasa.gov)
Document Information
| Document Title | Nitrogen Plasma Instabilities and the Growth of Silicon Nitride by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition |
|---|---|
| Author / Organization | Pool, F. S. |
| Subject & Discipline | Other |
| Categories | Aerospace & Aviation |
| Publication Year | 1996 |
| License / Rights | Public Domain / NASA STI Open Access |
| Resource Verification | Listed PDF (Verification Pending) |
| Original Host Website |
NASA Technical Reports Server
(ntrs.nasa.gov)
|
| File Format | application/pdf (Portable Document Format) |
| Language | EN |
| Catalog ID | DOC-65436 |
| Original Source Link | Visit Source Page on ntrs.nasa.gov » |