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Deep reactive ion etched anti-reflection coatings for sub-millimeter silicon optics
Patricio A. Gallardo, Brian J. Koopman, Nicholas F. Cothard, Sarah Marie M. Bruno, German Cortes-Medellin, Galen Marchetti, Kevin H. Miller, Brenna Mockler, Michael D. Niemack, Gordon Stacey, Edward J. Wollack

Deep reactive ion etched anti-reflection coatings for sub-millimeter silicon optics

Aerospace & Aviation Published 2026 Verification Pending
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Indexed from repository: NASA Technical Reports Server (ntrs.nasa.gov)

Document Information

Document Title Deep reactive ion etched anti-reflection coatings for sub-millimeter silicon optics
Author / Organization Patricio A. Gallardo, Brian J. Koopman, Nicholas F. Cothard, Sarah Marie M. Bruno, German Cortes-Medellin, Galen Marchetti, Kevin H. Miller, Brenna Mockler, Michael D. Niemack, Gordon Stacey, Edward J. Wollack
Subject & Discipline ACCEPTED_MANUSCRIPT
Categories Aerospace & Aviation
Publication Year 2026
License / Rights Public Domain / NASA STI Open Access
Resource Verification Listed PDF (Verification Pending)
Original Host Website NASA Technical Reports Server (ntrs.nasa.gov)
File Format application/pdf (Portable Document Format)
Language EN
Catalog ID DOC-21917
Original Source Link Visit Source Page on ntrs.nasa.gov »