ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices
Indexed from repository: NASA Technical Reports Server
(
ntrs.nasa.gov)
Document Information
| Document Title | ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices |
|---|---|
| Author / Organization | Afzaal Qamar, Hoang-Phuong Phan, Toan Dinh, Nam-Trung Nguyen, Mina Rais-Zadeh |
| Subject & Discipline | ACCEPTED_MANUSCRIPT |
| Categories | Aerospace & Aviation |
| Publication Year | 2026 |
| License / Rights | Public Domain / NASA STI Open Access |
| Resource Verification | Listed PDF (Verification Pending) |
| Original Host Website |
NASA Technical Reports Server
(ntrs.nasa.gov)
|
| File Format | application/pdf (Portable Document Format) |
| Language | EN |
| Catalog ID | DOC-19273 |
| Original Source Link | Visit Source Page on ntrs.nasa.gov » |