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Modification of optical properties in ultrathin ALD-grown NbN layers using oxygen plasma treatment

Author / Organization: Mustafa Teke, Nitesh Yerra, Alireza Sadeghi, Mario Ziegler, Detlef Born, Nan Du, Marco Diegel, Uwe Hübner, Sahitya V. Vegesna, Heidemarie Krüger

File Format PDF (Portable Document Format)
Publication Year 2026
Source Host arXiv (arxiv.org)
License / Terms arXiv Open Access / Creative Commons

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