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Ronan Leal

Public reference bibliography and cataloged PDF materials authored or published by Ronan Leal.

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Epitaxial growth of silicon by PECVD from SiF4/H2/Ar gas mixtures for photovoltaics

Year: 2017 • Source: hal.science • Listed PDF

This doctoral work aimed to assess the potential of low-temperature (200-300°C) epitaxy by plasma-enhanced chemical vapor deposition (PECVD) using SiF4/H2/Ar gas mixtures for the emitter formation in nPERT solar cells. T...