Home » Authors » Ji-Tao Wang, Shi-Li Zhang, Yong-Fa Wang, Wei Zhang, Zheng-Chang Chen, Ke-Yun Zhang, Yuan-Fang Wang

Ji-Tao Wang, Shi-Li Zhang, Yong-Fa Wang, Wei Zhang, Zheng-Chang Chen, Ke-Yun Zhang, Yuan-Fang Wang

Public reference bibliography and cataloged PDF materials authored or published by Ji-Tao Wang, Shi-Li Zhang, Yong-Fa Wang, Wei Zhang, Zheng-Chang Chen, Ke-Yun Zhang, Yuan-Fang Wang.

Found 1 document(s) Page 1 of 1

MODELING OF LPCVD SILICON NITRIDE PROCESS

Year: 1989 • Source: hal.science • Listed PDF

Much attention has been paid to the modeling of LPCVD process by several research groups and authors. Our simulation model of LPCVD process was proposed in 1979 and 1980, and then improved and extended several times. Our...