Home » Authors » Jacopo Remondina, Alain Portavoce, Maxime Bertoglio, Guillaume Roland, Frédéric Lorut, Yannick Le Friec, Daniel Benoit, Magali Putero

Jacopo Remondina, Alain Portavoce, Maxime Bertoglio, Guillaume Roland, Frédéric Lorut, Yannick Le Friec, Daniel Benoit, Magali Putero

Public reference bibliography and cataloged PDF materials authored or published by Jacopo Remondina, Alain Portavoce, Maxime Bertoglio, Guillaume Roland, Frédéric Lorut, Yannick Le Friec, Daniel Benoit, Magali Putero.

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Thermal desorption study on possible hydrogen sources and diffusion barriers in CMOS technology

Year: 2023 • Source: hal.science • Listed PDF

Hydrogen passivation of silicon dangling bonds is a key requirement in the realization of reliable CMOS devices. The creation of a hydrogen reservoir in the device near the silicon may be a solution supporting constant p...