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H. del Puppo, J. Desmaison, L. Peccoud

Public reference bibliography and cataloged PDF materials authored or published by H. del Puppo, J. Desmaison, L. Peccoud.

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A comparative study of O2/SiH4 and N2O/SiH4 mixtures for SiO2 deposition in a microwave afterglow

Year: 1993 • Source: hal.science • Listed PDF

Silicon dioxide films have been deposited in a microwave afterglow from N2O/SiH4 and O2/SiH4 mixtures. The effect of the pressure and of the substrate to silane injector distance is investigated, and leads to conclude th...