Home » Authors » Cédric Mannequin, Christophe Vallée, Katsuhiro Akimoto, Thierry Chevolleau, Christophe Durand, Christian Dussarrat, Takashi Teramoto, Etienne Gheeraert, Henri Mariette

Cédric Mannequin, Christophe Vallée, Katsuhiro Akimoto, Thierry Chevolleau, Christophe Durand, Christian Dussarrat, Takashi Teramoto, Etienne Gheeraert, Henri Mariette

Public reference bibliography and cataloged PDF materials authored or published by Cédric Mannequin, Christophe Vallée, Katsuhiro Akimoto, Thierry Chevolleau, Christophe Durand, Christian Dussarrat, Takashi Teramoto, Etienne Gheeraert, Henri Mariette.

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Comparative study of two atomic layer etching processes for GaN

Year: 2020 • Source: hal.science • Listed PDF

Atomic layer etching (ALE) of Ga-polar GaN (0001) using a standard inductively coupled plasma-reactive ion etching system is achieved in this work. The sequential process is using Cl2 to modify the surface in the adsorpt...