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C. Pickering, S. Sharma, S. Collins, A. Morpeth, G. Terry, A. Hodge

Public reference bibliography and cataloged PDF materials authored or published by C. Pickering, S. Sharma, S. Collins, A. Morpeth, G. Terry, A. Hodge.

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NON-DESTRUCTIVE CHARACTERISATION OF DEVICE PROCESSING OF SILICON-ON-SAPPHIRE (SOS) WAFERS

Year: 1988 • Source: hal.science • Listed PDF

Spectrosopic ellipsometry has been used to obtain microstructural and layer thickness information from processed SOS wafers consisting of poly-Si/gate oxide/epi- Si/sapphire structures. Oxide thickness and interface roug...