Multimodal deep learning for automated atomic qubits fabrication in silicon
Yuwei Cui, Kunrong Wu, Ping Wu, Luyan Yang et al. • Machine Learning: Science and Technology
(2026)
Donor-based spin qubits in silicon are a promising platform for scalable quantum computing due to their long coherence times and high-fidelity gate operations. A viable path for fabricating donor qubit arrays with atomic precision is scanni...
DOAJ
Open Access (DOAJ)
DOI:
10.1088/2632-2153/ae8e30