Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry
Wenyou Qiao, Zhishan Gao, Qun Yuan, Lu Chen et al. • Sensors
(2025)
High aspect ratio (HAR) sample-induced aberrations seriously affect the topography measurement for the bottom of the microstructure by coherence scanning interferometry (CSI). Previous research proposed an aberration compensating method usi...
DOAJ
Open Access (DOAJ)
DOI:
10.3390/s25134085