Efficient thermal dissipation in wafer-scale heterogeneous integration of single-crystalline β-Ga2O3 thin film on SiC
Wenhui Xu, Tiangui You, Yibo Wang, Zhenghao Shen et al. • Fundamental Research
(2021)
The semiconductor, β-Ga2O3 is attractive for applications in high power electronic devices with low conduction loss due to its ultra-wide bandgap (∼4.9 eV) and large Baliga's figure of merit. However, the thermal conductivity of β-Ga2O3 is ...
DOAJ
Open Access (DOAJ)
DOI:
10.1016/j.fmre.2021.11.003