Developing an Interferogram-Based Module with Machine Learning for Maintaining Leveling of Glass Substrates
Syuan-Cheng Chang, Chung-Ping Chang, Yung-Cheng Wang, Chi-Chieh Chu • Machines
(2023)
In this research, we propose a method that utilizes machine learning to maintain the parallelism of the resonant cavity in a Fabry–Perot interferometer designed specifically for glass substrates. Based on the optical principle and theory, w...
DOAJ
Open Access (DOAJ)
DOI:
10.3390/machines11060668